Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6942505 | Microelectronic Engineering | 2018 | 6 Pages |
Abstract
From chemistry to device fabrication: silicon NÂ +Â P Junctions formed by self-assembled monolayer doping process.191
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Astha Tapriya, Brian Novak, Scott Williams, Santosh Kurinec,