Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6942558 | Microelectronic Engineering | 2018 | 4 Pages |
Abstract
Metallic strain gauges are well studied structures for their use in force sensing. Their fabrication is rather simple, easily compatible with many techniques are broadly scalable in both quantity and resolution. Here we present a fabrication process for high resolution strain sensors (down to the nN) that can also be operated in liquid, i.e. for life sciences applications. This fabrication method offers a very high yield and opens new possibilities for bioengineering, as for example single cell studies.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Francesca Sorba, Cristina Martin-Olmos,