Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6942662 | Microelectronic Engineering | 2018 | 21 Pages |
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
S. Hin, M. Loskyll, V. Klein, M. Keller, O. Strohmeier, F. von Stetten, R. Zengerle, K. Mitsakakis,