On the use of two dimensional hexagonal boron nitride as dielectric

In this manuscript, we review the use of hexagonal boron nitride as dielectric, paying special attention to the synthesis methods, nanoscale homogeneity, reliability and dielectric breakdown process. In summary, hexagonal boron nitride is much more homogeneous and stable against electrical fields than other 3D dielectrics (such as HfO2) which can provide some advantages like reduced scattering effects and predictable dielectric breakdown process.