| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6942969 | Microelectronic Engineering | 2016 | 5 Pages |
Abstract
Schematic drawing of the constructing process and frictional mechanism of TA SAM and TA-HCTQ film.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Li Chen, Na Li, Baoping Yang, Junyan Zhang,