| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6943316 | Microelectronic Engineering | 2015 | 7 Pages |
Abstract
- A maskless exposure system was developed utilizing a commercial LCD video-projector.
- Only the projection optics was changed to a camera lens for macro-photography.
- The system is very simple, and has a small desk-top size of 300Â ÃÂ 400Â ÃÂ 500Â mm3.
- Patterns with a minimum width of 14 μm were smoothly printed in 14.3 Ã 10.7 mm2 field.
- The new lithography tool was fabricated by an expenditure of only Â¥500,000 â â¬3500.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Toshiyuki Horiuchi, Soichiro Koyama, Hiroshi Kobayashi,