| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6943393 | Microelectronic Engineering | 2015 | 4 Pages |
Abstract
Three consecutive etching steps resulting in multi-height structures from overlapping etches.169
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Nis K. Andersen, Rafael Taboryski,