| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6943502 | Microelectronic Engineering | 2015 | 5 Pages |
Abstract
- Electromechanical properties of metal films are studied with in-situ AFM-4PP tensile straining.
- AFM characterizes the surface damage and 4PP measures the resistance under tensile strain.
- The difference between local film necking and through thickness cracks can be made.
- It will be shown when the strain is removed, cracks bridge and the resistance decreases.
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Authors
Megan J. Cordill, O. Glushko, J. Kreith, V.M. Marx, C. Kirchlechner,