| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6943521 | Microelectronic Engineering | 2015 | 7 Pages |
Abstract
Resonant micro-sensors are single-sided fabricated in non-SOI single wafer and experimentally used for ppm-level organo-phosphorous gas detection.166
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Feng Yu, Pengcheng Xu, Jiachou Wang, Xinxin Li,