Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6943660 | Microelectronic Engineering | 2014 | 8 Pages |
Abstract
The amorphous fluoropolymer protective coatings for MEMS front-side releasing with hydrofluoric acid (HF) vapor.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Lan Zhang, Jian Lu, Hideki Takagi, Ryutaro Maeda,