Article ID Journal Published Year Pages File Type
6943736 Microelectronic Engineering 2013 4 Pages PDF
Abstract

- We fabricated a MEMS device and integrated the device with TEM. We actuated the MEMS device in TEM.
- The nano junction deformed due to induced shear actuation.
- We measured a shear force, a shear displacement and a shear stress at the nanoscale.
Keywords
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Preview
Development of MEMS integrated into TEM setup to monitor shear deformation, force and stress for nanotribology
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