Article ID Journal Published Year Pages File Type
6943800 Microelectronic Engineering 2013 7 Pages PDF
Abstract

- Direct nanopatterning of titanium using nanopatterned diamond based stamps.
- Quantify nanopillar matrix imprint depth with regards to feature size and density.
- An account of a novel method of reducing the imprint load required to emboss titanium.
- TEM and EELS analysis following our load reduction treatment.
- The first demonstration of nanopatterning curved, bulk titanium.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Authors
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