Article ID Journal Published Year Pages File Type
6943864 Microelectronic Engineering 2013 6 Pages PDF
Abstract

- High frequency resonators developed for frequency source applications.
- Resonators manufactured using Electron Beam Lithography on ZnO/Diamond substrate (nucleation side).
- Single and double port resonators built in the 3-6 GHz frequency range.
- Double port resonators found compatible with the oscillator application.
- Oscillator demonstration at 3 GHz : −90 dBc Hz−1 at 1 kHz and a floor noise of −165 dBc Hz−1.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Authors
, , , , , , , ,