| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6943886 | Microelectronic Engineering | 2013 | 5 Pages |
Abstract
- Defects induced by NIL processes on 1D and 2D gratings are numerically quantified.
- Defects are detected using a specific image processing mainly based on mathematical morphology.
- A statistical analysis can be compute to automatically quantify defects and estimate the quality of a structure.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
David Pietroy, Issam Gereige, Cécile Gourgon,