| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6943961 | Microelectronic Engineering | 2013 | 7 Pages |
Abstract
- 3Â wt.% EH-3 and TMN-3 are chosen to form scCO2 microemulsions.
- 2Â vol.% DMSO and IPA can enhance HDI PR efficiency by 75.5% and 64.2%.
- DMSO and EH-3 show a positive synergistic effect on the stripping efficiency.
- scCO2 density tuned by temperature and pressure affects HDI PR stripping behavior.
- 100% Removal efficiency is achieved at 60 °C and 25 MPa for 20 min.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Bo Li, Tingting Han, Lei Wang, Qingpu Wang, Yuxiang Li,