Article ID Journal Published Year Pages File Type
6943997 Microelectronic Engineering 2013 4 Pages PDF
Abstract

- The YGeOx enjoys a low interface trap density of 2.1 × 1011 cm−2 eV−1.
- Low leakage current of 3.1 × 10−10 A/cm2 at the effective electric field of 1 MV/cm.
- 13 mV flatband voltage shift for BTI test under 10 MV/cm for 8000 s at 85 °C.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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