Article ID Journal Published Year Pages File Type
6944012 Microelectronic Engineering 2013 4 Pages PDF
Abstract

- Gold nanoparticle production.
- Deposition of amorphous silicon by e-beam evaporation method.
- Annealing of amorphous silicon for crystallization by gold nanoparticles.
Keywords
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Preview
Low temperature crystallization of amorphous silicon by gold nanoparticle
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