| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944119 | Microelectronic Engineering | 2013 | 4 Pages |
Abstract
⺠SAWS with Pd nanoporous sensing material were investigated for H2 detection at RT. ⺠The sensitivity and LOD at RT was 0.31 Hz/ppm and 48 ppm respectively. ⺠Sensor response is proportional to the concentration and is reversible. ⺠For a concentration of 0.2-0.8H2 in air the response times were 15-44 s. ⺠The sensors performance was improved using a nanoporous Pd layer deposited by PLD.
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Authors
Cristian Viespe, Constantin Grigoriu,