Article ID Journal Published Year Pages File Type
6944143 Microelectronic Engineering 2013 4 Pages PDF
Abstract

- Mobility in highly doped junctionless trigate MOSFETs is experimentally studied.
- Mobility enhancement in narrow nanowire versus wide devices is demonstrated.
- Mobility values in narrow nanowire MOSFETs exceed the bulk mobility value.
- These effects are due to reduced impurity scattering in narrow nanowire devices.
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Physical Sciences and Engineering Computer Science Hardware and Architecture
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