Article ID Journal Published Year Pages File Type
6944144 Microelectronic Engineering 2013 4 Pages PDF
Abstract

- Advanced FinFETs are fabricated on the ONO buried insulator.
- The nitride buried insulator can trap charges for the flash memory operation.
- The same device was investigated for the 1T-DRAM operation.
- By combining nonvolatile and volatile, multi-bit 1T-DRAM operation was obtained.
- Analog/logic and memory operation can be performed at the same cell.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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