Article ID Journal Published Year Pages File Type
6944160 Microelectronic Engineering 2013 4 Pages PDF
Abstract

- Over-one-year-long test results for low-k dielectric TDDB are reported.
- A methodology has been set up to compare different models that predict lifetime.
- The lucky-electron model shows a higher ability to predict dielectric lifetime.
- The fitting parameters are determined independently from the MTTF fit.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Authors
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