| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944196 | Microelectronic Engineering | 2012 | 5 Pages |
Abstract
⺠An accurate method to characterize nanoobject-metal line contacts is presented. ⺠The contact end resistance test structure is adapted from microelectronics. ⺠The measurement of an individual nanocontact is allowed. ⺠Contact resistivity allows prediction of contact resistance for any contact size.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
J. Santander, I. Martin-Fernandez, X. Borrisé, G. Rius, C. Cané,