| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944358 | Microelectronic Engineering | 2012 | 5 Pages |
Abstract
⺠Ni and Si materials were used as imprinting molds. ⺠The relationship between process condition and imprinting quality had been systematically investigated by Taguchi method. ⺠Temperature is the most effective factor of different line width molds using ultrasonic nanoimprint lithography. ⺠Imprinting force is the most significant factor between different materials of molds.
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Authors
Po-Yuan Tseng, Chien-Hung Lin,