| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944375 | Microelectronic Engineering | 2012 | 5 Pages |
Abstract
⺠The irradiance is influenced by diffraction effects in SLM-based lithography. ⺠Dynamic sub-pixelation (DSP) is proposed to enhance image resolution. ⺠The diffraction effect is suppressed as the DSP degree increases. ⺠Specific lithography parameters and their relationships for DSP are defined. ⺠The potential of utilizing DSP for suppressing diffraction effects is demonstrated.
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Authors
Manseung Seo, Haeryung Kim,