| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944383 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠Working stamp needs anti-adhesion layer for step and NIL repetition. ⺠We fabricated working stamps using PVSZ and Ormostamp materials. ⺠After repetition imprints, PVSZ stamp could be maintained contact angle. ⺠PVSZ stamp no needs surface modification and be used as an ideal stamp.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Hyun-Ha Park, Sungjune Park, Hana Kim, HyungJun Lim, Dong-Pyo Kim, JaeJong Lee,