Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6944402 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠A double-slit-grating (DSG) is presented for improving the spectral resolution of microspectrometer. ⺠Develop a simple and low-cost method of fabricating DSG. ⺠The spectral properties of DSG is calculated which can realize the spectral resolution of 0.1 nm.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Zhiyou Zhang, Yukun Zhang, Shuhong Li, Jinglei Du, Fuhua Gao, Ruiying Shi, Bangcheng Yang,