Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6944410 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠The OTFTs with the nano-groove Al gate electrodes were fabricated by UV nano imprint technology. ⺠The nano-groove Al gate electrodes were fabricated by UV nano imprint and reactive ion etching. ⺠The molecular orientations of pentacene were improved by nano-groove Al structures. ⺠The OTFTs with nano-groove Al gate electrodes have much better performances than those with the single ones.
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Authors
Henry J.H. Chen, Yen-Bang Liu, Jun-Yu Chen,