Article ID Journal Published Year Pages File Type
6944410 Microelectronic Engineering 2012 4 Pages PDF
Abstract
► The OTFTs with the nano-groove Al gate electrodes were fabricated by UV nano imprint technology. ► The nano-groove Al gate electrodes were fabricated by UV nano imprint and reactive ion etching. ► The molecular orientations of pentacene were improved by nano-groove Al structures. ► The OTFTs with nano-groove Al gate electrodes have much better performances than those with the single ones.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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