| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944436 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠Titania sol-gel films up to 1 μm micro- and nano- imprinted at low pressure (<40 MPa). ⺠Imprinted structures transformed in inorganic TiO2 (TiO2 > 90% w/w) by UV curing. ⺠High refractive index of the structures up to 2.4 at 300 nm after UV. ⺠Crack-free 510 nm structures depth.
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Authors
E. Zanchetta, V. Auzelyte, J. Brugger, A.V. Savegnago, G. Della Giustina, G. Brusatin,