| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944444 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠We demonstrate manufacturing of three-dimensional stamp fabrication process based on hybrid 3D nanofabrication processes. ⺠Combination of e-beam lithography, X-ray LIGA and thermal imprint lithography. ⺠Angular controlled imprints on pre-patterned substrate.
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Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
T. Haatainen, T. Mäkelä, A. Schleunitz, G. Grenci, M. Tormen,