| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944482 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠Automated image analysis of Si surfaces supports scanning probe lithography. ⺠Atomic terraces, dimers, vacancies, and dangling bonds are identified. ⺠This technology supports a program for atomically precise manufacturing.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
J.N. Randall, J.R. Von Ehr, J.B. Ballard, J.H.G. Owen, E. Fuchs,