Article ID Journal Published Year Pages File Type
6944508 Microelectronic Engineering 2012 4 Pages PDF
Abstract
► The negative photoresist Epocore is doped by three commercially-available with the purpose to obtain a selective absorbance filters. ► The structures of dye-doped Epocore are fabricated by a standard UVphotolithographic process. ► The structurability of the dye-doped Epocore is retained with a reduction of the resolution as the dose increases. ► The spectral response of the dye-doped Epocore filters shows a selective passbands and stopbands. ► After the bleaching study, the dye-doped Epocore shows a high photostability retaining 96% of its filtering ability.
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