| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944517 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠Homogeneous periodic nano-cone arrays are created by FIB milling. ⺠For planar Si, a very simple and efficient patterning method is demonstrated. ⺠Arrays can be scaled without change of homogeneity. ⺠Cone shape can be varied by proper choice of beam current. ⺠For protruded samples, patterning strategy is adapted by proper dwell time variation.
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Authors
M. Rommel, A.J. Bauer, L. Frey,