| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944525 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠We studied perfluoropolyether (PFPE) as the mold material for thermal nanoimprint. ⺠The PFPE-based mold was fabricated from a master by casting and thermal-curing. ⺠It is capable of resolution far better than 100 nm. ⺠Its elastic modulus obtained by nanoindentation is two orders higher than PDMS. ⺠The surface of the PFPE-based film is much stiffer and harder than the bulk.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Celal Con, Jian Zhang, Zeinab Jahed, Ting Y. Tsui, Mustafa Yavuz, Bo Cui,