Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6944526 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠Fabrication of ordered arrays of GaN nanocolumns by focused ion beam. ⺠Control of the geometries of the nanocolumns by ion beam dose. ⺠Fabrication on GaN nanocylinders.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Javier Martinez, Francesca Barbagini, Ana Bengoechea-Encabo, Steven Albert, Miguel Angel Sanchez GarcÃa, Enrique Calleja,