Article ID Journal Published Year Pages File Type
6944535 Microelectronic Engineering 2012 4 Pages PDF
Abstract
► Holographic grating defined in AZ-1500 is transferred onto quartz mold by RIE. ► Sinusoidally-surface-corrugated rectangular groove is imprinted into UV-cure resin. ► R6G-doped SU-8 grating waveguide is produced by filling imprinted groove with SU-8. ► DFB lasing takes place in R6G-doped SU-8 grating waveguide pumped by 532 nm YAG laser. ► Combined use of polymers will provide a wide choice of core and cladding materials.
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