Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6944535 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠Holographic grating defined in AZ-1500 is transferred onto quartz mold by RIE. ⺠Sinusoidally-surface-corrugated rectangular groove is imprinted into UV-cure resin. ⺠R6G-doped SU-8 grating waveguide is produced by filling imprinted groove with SU-8. ⺠DFB lasing takes place in R6G-doped SU-8 grating waveguide pumped by 532 nm YAG laser. ⺠Combined use of polymers will provide a wide choice of core and cladding materials.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Tahito Aida, Takao Tokuhara, Shusuke Asahi, Hiroya Matsukawa, Hiroshi Kumagai,