| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944543 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠A new and simple air-bridge fabrication technology. ⺠Simple resist selection gives fewer and simpler fabrication processes. ⺠No special e-beam dose or process calibration required. ⺠The process latitude of UVIII resist and polyamide is exploited. ⺠Excellent experimental demonstration for mm-wave application.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Ata Khalid, Chong Li, James Grant, Shimul Saha, Susan Ferguson, David R.S. Cumming,