| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944544 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠An efficient nanofabrication technique based on nanosphere lithography and soft lithography is developed. ⺠Smaller interstitial spaces between spheres are achievable by self assembly of colloidal spheres over PDMS microbowls mould. ⺠Size of metallic patterns over PDMS can be tuned by either controlling metal deposition or using different spheres in size. ⺠Gold nanoparticles with perpendicular bisector of 210 nm and height of 50 nm were obtained in curvilinear triangular shape. ⺠The proposed nanofabrication process is suitable for volume nanopattern production at low costs.
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Authors
A. Mohammadkhani, H. Hassanin, C. Anthony, K. Jiang,