| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944560 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠We observed diffusion of UV-Polymer into different PDMS stamp materials. ⺠Diffusion depends on the hardness of the PDMS stamp material. ⺠Diffusion depends on the number of imprints and the time between two imprints. ⺠The harder the PDMS material, the higher is the pattern transfer accuracy. ⺠The harder the PDMS material, the longer is the PDMS stamp life time.
Keywords
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Hardware and Architecture
Authors
H. Schmitt, P. Duempelmann, R. Fader, M. Rommel, A.J. Bauer, L. Frey, M. Brehm, A. Kraft,