| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944568 | Microelectronic Engineering | 2012 | 5 Pages |
Abstract
⺠We implemented a new concept of a UV-RNIL system for flexible substrates. ⺠Silicone rubber is wrapped around the press roller to control the contact length. ⺠A focused line beam of UV is illuminated on the contact area to cure the resist. ⺠We verified the system by simulations and experiments on micro- and nano-patterning. ⺠The system can be used to produce flexible nanopatterned devices.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
HyungJun Lim, GeeHong Kim, Kee-Bong Choi, Mira Jeong, JiHyeong Ryu, JaeJong Lee,