| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944575 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠Multi-layer masters with μm and nm patterns in one mold. ⺠Double polymer mold casting for tone inversion. ⺠Residual layer free reverse imprint.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Andreas Finn, René Hensel, Falk Hagemann, Robert Kirchner, Andreas Jahn, Wolf-Joachim Fischer,