| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944585 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠We do X-ray exposure to the feedstock contains Steel powder and SU-8 photoresist. ⺠Development process succeeds to separate exposed and non-exposed area of SU-8. ⺠TGA analysis of SU-8 was examined to find the optimum debinding parameter. ⺠Sintering process in low temperature will promote necking and pores formation. ⺠A remain SU-8 still exist in the center of cross section area from sintered sample.
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Authors
Andy Tirta, Eung Ryul Baek, Suk Sang Chang, Jong Hyun Kim,