Article ID Journal Published Year Pages File Type
6944586 Microelectronic Engineering 2012 4 Pages PDF
Abstract
► Developed a technique of size reduction to sub-ten nanometers by FIB milling. ► FIB milling is a top-down and site-specific approach with atomic resolution. ► No remarkable morphology and microstructure changes of W composite nanowires were observed after thinning. ► FIB thinning is an effective method towards size and quantum effects observation.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Authors
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