Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6944586 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠Developed a technique of size reduction to sub-ten nanometers by FIB milling. ⺠FIB milling is a top-down and site-specific approach with atomic resolution. ⺠No remarkable morphology and microstructure changes of W composite nanowires were observed after thinning. ⺠FIB thinning is an effective method towards size and quantum effects observation.
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Authors
Wuxia Li, Ajuan Cui, Changzhi Gu, P.A. Warburton,