| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944594 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠FIB prototyping of graphene electronic devices without FIB imaging. ⺠FIB milled trenches isolate current to channel region. ⺠Better than 250 nm alignment accuracy. ⺠Ohmic contact between graphene and FIB deposited electrodes.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Marek E. Schmidt, Zaharah Johari, Razali Ismail, Hiroshi Mizuta, Harold M.H. Chong,