| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944626 | Microelectronic Engineering | 2012 | 5 Pages |
Abstract
⺠A novel polymeric cantilever sensor is designed and fabricated. ⺠A titanium thin film with resistivity of 1320 Ω nm is used as the piezoresistor. ⺠Increased resistivity of the piezoresistor increases the minimum feature size. ⺠Increased minimum feature size of 40 μm leads to inexpensive, simple fabrication.
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Authors
A. Shokuhfar, P. Heydari, M.R. Aliahmadi, M. Mohtashamifar, S. Ebrahimi-Nejad R., M. Zahedinejad,