| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944660 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠E-beam patterning with nanoholes with diameter down to 30 nm. ⺠Achievement of highly ordered GaN/InGaN nanorods arrays. ⺠Demonstration of intense and precise nano-emitters.
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Physical Sciences and Engineering
Computer Science
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Authors
Francesca Barbagini, Ana Bengoechea-Encabo, Steven Albert, Pierre Lefebvre, Javier Martinez, Miguel Angel Sanchez-Garcia, Achim Trampert, Enrique Calleja,