Article ID Journal Published Year Pages File Type
6944676 Microelectronic Engineering 2012 4 Pages PDF
Abstract
► We have developed a test structure for very low Schottky Barrier Height extraction. ► We study the effect of dopant segregation associated to strained silicon on PtSi. ► We show the cumulative effects of two Schottky Barrier Height lowering methods.
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Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Preview
Schottky Barrier Height reduction using strained silicon-on-insulator and dopant segregation
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