Vertically aligned carbon nanotube arrays as vertical comb structures for electrostatic torsional actuator

Article ID	Journal	Published Year	Pages	File Type
6944692	Microelectronic Engineering	2012	4 Pages	PDF

Abstract

âº We develop vertically aligned carbon nanotube (VACNT) array as comb structure. âº The VACNT array on stator provides vertical height mismatch with respect to rotor. âº The VACNT array induces out-of-plane electrostatic torsional motion of rotor. âº Optical scan angle is 28.4Â° at resonant frequency of 1.537Â kHz. âº Torsional actuator with VACNT array exhibits high reliability and robustness.

Keywords

Micromirror Vertically aligned carbon nanotube

Related Topics

Physical Sciences and Engineering Computer Science Hardware and Architecture

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Vertically aligned carbon nanotube arrays as vertical comb structures for electrostatic torsional actuator

Authors

Jungwook Choi, Youngkee Eun, Soonjae Pyo, Jaesam Sim, Jongbaeg Kim,