Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
6944700 | Microelectronic Engineering | 2012 | 5 Pages |
Abstract
⺠A technique for FIB-grown Pt nanopillar shape manipulation was developed. ⺠Pt nanopillars bent towards the incident ion beam until became parallel to it. ⺠The bending process can be controlled through different parameters. ⺠Bending and surface morphology modification occurred simultaneously.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Ajuan Cui, Wuxia Li, Qiang Luo, Zhe Liu, Changzhi Gu,