Article ID Journal Published Year Pages File Type
6944700 Microelectronic Engineering 2012 5 Pages PDF
Abstract
► A technique for FIB-grown Pt nanopillar shape manipulation was developed. ► Pt nanopillars bent towards the incident ion beam until became parallel to it. ► The bending process can be controlled through different parameters. ► Bending and surface morphology modification occurred simultaneously.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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