| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6944757 | Microelectronic Engineering | 2012 | 4 Pages |
Abstract
⺠New concept of phase shifter for millimeter wave frequencies. ⺠State-of-the-art performance is expected. ⺠Simple post-CMOS maskless etch is used to realize electrostatically actuated MEMS. ⺠Virtually no power consumption, small foot print, and low loss for 360° phase shift.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Gustavo Rehder, Trang Vo, Philippe Ferrari,