Article ID Journal Published Year Pages File Type
6944774 Microelectronic Engineering 2012 4 Pages PDF
Abstract
► Use of macroporous silicon as a hydrogen diffusion layer in integrated planar proton exchange membrane micro-fuel cells. ► Fuel cell active surface enhanced applying electrochemical etching process to 3D corrugated-like silicon substrates. ► 8 ccm/cm2 H2 flow rate through the planar porous substrates with an incoming pressure of 5 mbars and four time higher in the case of 3D membranes. ► Power densities up to 250 mW/cm2 for planar micro fuel cells.
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Physical Sciences and Engineering Computer Science Hardware and Architecture
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